SIFREN®46 High Performance Etch Gas Solvay Fluor Solvay Fluor Product Description SIFREN®46 SIFREN® 46 (C4F6 or Hexafluoro-1,3-butadiene) is an unsaturated fluorocarbon with an alternating double bond. It is a colourless, odourless, toxic and flammable gas showing very high performance for critical plasma etching in semiconductor devices manufacturing. Due to the short atmospheric lifetime (< 1day), the negligible global warming potential and the inertness to the stratospheric ozone layer, SIFREN® 46 is an environmentally friendly gas. Thanks to the high C:F ratio of its molecule, it is possible to balance in the plasma etching and deposition species, by which superior results are achieved compared to other fluorinated gases, both in terms of selectivity and aspect ratio. This intrinsic characteristic and a wider process window than e.g. C4F8 (Octafluorocyclebutane) are particularly beneficial for sub 130 nm nodes productions. Use Conditions At about 20 °C, SIFREN® 46 is a stable gas and is compatible with the most carbon- or stainless-steel types. The chemically behaviour in presence of other metals like e.g. copper, tin, brass, zinc is not completely studied. In contact with magnesium or alloys with high magnesium (> 2%) content, reactions are possible, contact must be avoided. The compatibility with plastics and elastomers depends on the temperature employed and additional additives in the plastics materials. Fluoro-rubbers are not always the best solution. LDPE, EPDM, PVC and Nylon are suitable plastics for SIFREN® 46. Material compatibility tests with SIFREN® 46 are recommended. Toxicology SIFREN® 46 is classified according to the EU Directives as a harmful substance by inhalation or in contact with skin and eyes, in case of intense or continuous exposure. Toxicity testing shows a LC50 inhalation value (4 h) of 4.42 mg/l for rats. In vitro testing shows that SIFREN® 46 is not geno-toxic. The inhalation of gas is irritating to the respiratory tract. The contact of liquid SIFREN® 46 with skin and eyes may cause in frostbites. The recommended Occupational Exposure Level (OEL), also taken as the Company Internal Limit is 0.5 ppm for a 8-hour working day. Warnings Cylinders filled with SIFREN® 46 should be stored in a cool, dry and well ventilated area. Keep cylinders away from heat and ignition sources or flammable substances. The product may be only used in plants equipped with explosion protected electrical devices: Working and storage areas have to be provided with a fire extinguishing system. For preventing oxygen displacement ventilation of depressed areas e.g. floors, cellars are necessary. Further information can be obtained from our Technical Service Department. Packaging SIFREN® 46 can be ordered in 10, 20, 40 and 47 l cylinder. Cylinders Capacity 10 l TPED 20 l TPED 40 l TPED 47 l DOT Max filling weight 10 kg 20 kg 40 kg 47 kg Height with cap 960 mm 970 mm 1,670 mm 1,565 mm Outer diam. 140 mm 204 mm 204 mm 232 mm Tare with cap 14 kg 29 kg 48 kg 55 kg Valve DIN6/ DISS-724 DIN6/ DISS-724 DIN6/ DISS-724 DISS-724 SIFREN®46 Solvay Fluor Chemical and Physical Properties Chemical Formula CF2=CF–CF=CF2 Molecular Weight g/mol Boiling Temperature °C 5.5 Freezing Temperature °C –130.0 Critical Temperature °C 139.6 Critical Pressure bar 31.9 Liquid Density (15 °C) kg/l 1.44 Vapour Density (15 °C) kg/m3 6.8 Specific Volume of Vapour (at b.p.) dm3/kg Vapour Pressure (0 °C) bar 0.81 Vapour Pressure (25 °C) bar 2.11 Heat of Vaporization (at b.p., 1.013 bar) kJ/kg Enthalpy of Formation (Vapour) kJ/mol – 942.2 Sat. Liquid Specific Heat (Cp, 25 °C) J/kg·K 1,134.1 Sat. Vapour Specific Heat (Cp, 25 °C) J/kg·K 843.7 Sat. Liquid Thermal Conductivity W/m·K 0.107 Sat. Vapour Thermal Conductivity W/m·K 0.00972 Ionization Energy eV 9.5 Solubility in Water g/l insoluble Flammability Limits in Air %vol 7 – 73 Occupational Exposure Limit (OEL) ppm 0.5 ODP Lifetime day <1 GWP (estimated) ITH 100 y <1 162.03 135.8 161.8 0 Pressure (bar) Pressure/Temperature Data for SIFREN®46 9 Temperature (°C) Pressure (bar) 0 0.81 10 1.22 6 20 1.77 5 30 2.51 40 3.46 50 4.66 60 6.16 2 70 7.99 1 8 7 4 3 0 0 10 20 30 40 50 60 70 Temperature (°C) 32/100/03.10/007/1.000 Solvay Fluor – Competence in Fluorine Chemistry. Worldwide. Solvay Fluor GmbH Postfach 220 30002 Hannover Germany Telefon +49 511 857-0 Telefax +49 511 857-2146 www.solvay-fluor.com Disclaimer To our present knowledge, the information contained herein is accurate as of the date of this document. However, neither Solvay nor any of its affiliates makes any warranty, express or implied, or accepts any liability in connection with this information or its use. This information is for use by technically skilled persons at their own discretion and risk and does not relate to the use of this product in combination with any other substance or any other process. This is not a license under any patent or other proprietary right. The user alone must finally determine suitabilty of any information or material for any contemplated use, the manner of use in compliance with relevant legislations and whether any patents are infringed. Solvay reserves its right to make additions, deletions, or modifications to the information at any time without prior notification.
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